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Effects of Abrasive Size and Concentration with An-ionic Surfactant on the Non-Prestonian Behavior of Ceria Slurry in STI-CMP
- 제목
- Effects of Abrasive Size and Concentration with An-ionic Surfactant on the Non-Prestonian Behavior of Ceria Slurry in STI-CMP
- 저자
- 백운규
- 발행일
- 2006-11-03
- 학회명
- ECS-2006 JOINT INTERNATIONAL MEETING
- 개최지
- Moon Palace Hotel(Mexico)