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Comparison of Removal Efficiency of Cu impurity on Si(100) depending on the cleaning splits of (UV/O3 + HF) and (H2O2 +HF)

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Comparison of Removal Efficiency of Cu impurity on Si(100) depending on the cleaning splits of (UV/O3 + HF) and (H2O2 +HF)
저자
전형탁
발행일
1997-04-01
학회명
Mat. Res. Soc. Symp

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