Nonlinear structural dynamic analyses of micro cantilever beams actuated by electrostatic force

초록

Nonlinear modeling method for the structural dynamic analysis of a micro cantilever beam actuated by electrostatic force is presented in this study. Static deflection is first obtained by solving nonlinear static equilibrium equation and the modal and the stability characteristics are calculated at the static equilibrium position. It is found that the amplitude and the frequency of the applied electrostatic voltage influence the stability of the structure significantly.

키워드