ScholarWorks@한양대학교

상세 보기

Resist Trimming Technique in Oxygen Plasma for Sub-30nm Pillar Array

제목
Resist Trimming Technique in Oxygen Plasma for Sub-30nm Pillar Array
저자
이승백
발행일
2011-12-05
학회명
2011 한국자기학회
개최지
Ramada hotel, Jeju

ScholarWorks@한양대학교

(04763) 서울특별시 성동구 왕십리로 222 Tel. +82-2-2220-1370 +82-2-2220-1366

COPYRIGHT © 한양대학교 All Rights Reserved.

Certain data included herein are derived from the © Web of Science of Clarivate Analytics. All rights reserved.

You may not copy or re-distribute this material in whole or in part without the prior written consent of Clarivate Analytics.