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Optical properties of nanostructured SiOxNy prepared by plasma enhanced chemical vapor deposition

  • 김은규
제목
Optical properties of nanostructured SiOxNy prepared by plasma enhanced chemical vapor deposition
저자
김은규
발행일
2003-10-27
학회명
Inter. Symp. on Advanced Photonic Science and Technology
개최지
Shanghai & Wu-Yi, China

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