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Characterization and electrical properties of ultra thin HfO2 gate dielectrics prepared by atomic layer deposition
- 제목
- Characterization and electrical properties of ultra thin HfO2 gate dielectrics prepared by atomic layer deposition
- 저자
- 안진호
- 발행일
- 2002-04-01
- 학회명
- MRS 2002 spring meeting
- 개최지
- 샌프란시스코