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Oxynitride Mediated Epitaxy For Epitaxial CoSi2 Growth

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Oxynitride Mediated Epitaxy For Epitaxial CoSi2 Growth
저자
전형탁
발행일
2009-10-08
학회명
2009년도 제7회 표면분석심포지엄
개최지
덕산스파캐슬

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