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Oxidant Effect during HfO2 Deposition on the Electrical and Chemical Characteristics of Metal-Insulator-Ge Capacitors.
- 제목
- Oxidant Effect during HfO2 Deposition on the Electrical and Chemical Characteristics of Metal-Insulator-Ge Capacitors.
- 저자
- 안진호
- 발행일
- 2009-04-15
- 학회명
- Materials Research Society
- 개최지
- USA(San Francisco)