Oxidant Effect during HfO2 Deposition on the Electrical and Chemical Characteristics of Metal-Insulator-Ge Capacitors.

제목
Oxidant Effect during HfO2 Deposition on the Electrical and Chemical Characteristics of Metal-Insulator-Ge Capacitors.
저자
안진호
발행일
2009-04-15
학회명
Materials Research Society
개최지
USA(San Francisco)