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Effect of Condensation Temperature on Surface Roughness for Relaxed SiGe Layer-on-insulator

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Effect of Condensation Temperature on Surface Roughness for Relaxed SiGe Layer-on-insulator
저자
박재근
발행일
2009-02-20
학회명
제16회 한국반도체 학술대회
개최지
대전컨벤션센터

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