Effect of sputtering oxgen partial pressuresn on opticcal and structural properties of p-type NiO thin film deposited by RF magnetron sputtering method

  • 김태환
제목
Effect of sputtering oxgen partial pressuresn on opticcal and structural properties of p-type NiO thin film deposited by RF magnetron sputtering method
저자
김태환
발행일
2009-09-22
학회명
THE 2nd INTERNATIONAL CONFERENCE ON MICROELECTRONICS AND PLASMA TECHNOLOGY (ICMAP 2009)
개최지
BEXCO Convention Center, Busan, Korea