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Crystallinity Change of Zro2 Thin Film according to Oxygen Radical Density in ICP Rep;ote Plasma ALD

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Crystallinity Change of Zro2 Thin Film according to Oxygen Radical Density in ICP Rep;ote Plasma ALD
저자
전형탁
발행일
2024-11-12
학회명
KISM 2024

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