Real-time detection of airborne dust particles using highly sensitive paddle-type MEMS sensors

초록

Real-time detection of airborne dust particles using highly sensitive paddle-type MEMS sensors

제목
Real-time detection of airborne dust particles using highly sensitive paddle-type MEMS sensors
저자
이승백
발행일
2009-08-27
학회명
NanoKorea
개최지
Kintex