Fabrication of On-Chip Fluidic Channels Incorporating Nanopores using Self-Aligned Double Layer Resist Processing Technique

제목
Fabrication of On-Chip Fluidic Channels Incorporating Nanopores using Self-Aligned Double Layer Resist Processing Technique
저자
이승백
발행일
2012-06-29
학회명
International conference on Electron, Ion, and Photon Beam technology and Nanofabrication 2012
개최지
Hilton Waikoloa Village, Hawaii, USA