상세 보기
Fabrication of On-Chip Fluidic Channels Incorporating Nanopores using Self-Aligned Double Layer Resist Processing Technique
- 제목
- Fabrication of On-Chip Fluidic Channels Incorporating Nanopores using Self-Aligned Double Layer Resist Processing Technique
- 저자
- 이승백
- 발행일
- 2012-06-29
- 학회명
- International conference on Electron, Ion, and Photon Beam technology and Nanofabrication 2012
- 개최지
- Hilton Waikoloa Village, Hawaii, USA