Performance of high k HfO2 gate oxide prepared by an inductively coupled rf sputtering system at room temperature

제목
Performance of high k HfO2 gate oxide prepared by an inductively coupled rf sputtering system at room temperature
저자
홍진표
발행일
2003-10-24
학회명
2003년도 가을 학술논문발표회
개최지
경북대