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Plasma etching of silicon-related materials with non-global warming gas of CF3I for in-situ chamber cleaning
- 제목
- Plasma etching of silicon-related materials with non-global warming gas of CF3I for in-situ chamber cleaning
- 저자
- 안진호
- 발행일
- 2021-07-07
- 학회명
- NANO KOREA 2021
- 개최지
- 일산 KINTEX / 온라인 개최