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Improvements of Self-Aligned Multi Patterning Spacer Technology by PEALD Sn-doped SiO2

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제목
Improvements of Self-Aligned Multi Patterning Spacer Technology by PEALD Sn-doped SiO2
저자
전형탁
발행일
2022-11-30
학회명
2022 MRS Fall meeting&exhibit
개최지
Hynes Convention Center l Boston, Massachusetts, USA

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