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Plasma-Enhanced Atomic Layer Deposition Sequence Modification for Controlling Subthreshold Swing in a-IGZO Transistors
- 제목
- Plasma-Enhanced Atomic Layer Deposition Sequence Modification for Controlling Subthreshold Swing in a-IGZO Transistors
- 저자
- 정재경
- 발행일
- 2024-03-28
- 학회명
- ITC 2024
- 개최지
- KAIST, Korea