상세 보기
properties of si-based nanostructures fabricated by PECVD and UHV sputtering methods
- 제목
- properties of si-based nanostructures fabricated by PECVD and UHV sputtering methods
- 저자
- 홍진표
- 발행일
- 2003-09-23
- 학회명
- The 10th Korea-china symposium on thin film materials
- 개최지
- 이화여대