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Atomic layer deposition of functional oxide thin films in display applications
- 제목
- Atomic layer deposition of functional oxide thin films in display applications
- 저자
- 박진성
- 발행일
- 2014-10-16
- 학회명
- The 2nd International Conference on ALD Applications & 3rd China ALD Conference
- 개최지
- Fudan University, Shanghai, China