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Non-Prestonian Behavior of Ceria Slurry in Shallow Trench Isolation Chemical Mechanical Polishing(STI-CMP)

  • 김태환
제목
Non-Prestonian Behavior of Ceria Slurry in Shallow Trench Isolation Chemical Mechanical Polishing(STI-CMP)
저자
김태환
발행일
2007-11-02
학회명
The 11th North-East Asia Symposium on Nano, Information Technology and Reliability (NASNIT 2007)
개최지
Harbin Institute of Technology, Harbin, China

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