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Nanotopography Simulation of Shallow Trench Isolation Chemical Mechanical Polishing Using Nano Ceria Slurry

  • 박재근
제목
Nanotopography Simulation of Shallow Trench Isolation Chemical Mechanical Polishing Using Nano Ceria Slurry
저자
박재근
발행일
2004-07-08
학회명
KIEEME Annual Summer Conference 2004
개최지
Yong-Peong Resort, KangWon-do, Korea

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