Contact Resistivity Reduction in IGZO/Metal Interfaces via Ultra-Thin SiO2 Layers: Comparative Analysis Using TLM and CBKR

제목
Contact Resistivity Reduction in IGZO/Metal Interfaces via Ultra-Thin SiO2 Layers: Comparative Analysis Using TLM and CBKR
저자
박진성
발행일
2025-06-04
학회명
IEEE IITC 2025
개최지
부산 웨스틴조선호텔