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Synthesis and characterization of novel molecular precursors of the oxides of zirconium and hafnium for the ALD

  • 구상만
제목
Synthesis and characterization of novel molecular precursors of the oxides of zirconium and hafnium for the ALD
저자
구상만
발행일
2004-03-28
학회명
227th ACS National Meeting
개최지
Anaheim, CA, United States

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