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Annihilation of Threading Dislocation in Strain-Relaxed Si1-xGex Layer by Hydrogen Ion Implantation

  • 박재근
제목
Annihilation of Threading Dislocation in Strain-Relaxed Si1-xGex Layer by Hydrogen Ion Implantation
저자
박재근
발행일
2016-10-07
학회명
230th ECS Meeting
개최지
Hawaii Convention Center and the Hilton Hawaiian Village

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