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Detection and removal of airborne nanoparticles using kinetic and electrostatic force of paddle-type bridge MEMS sensors
- 제목
- Detection and removal of airborne nanoparticles using kinetic and electrostatic force of paddle-type bridge MEMS sensors
- 저자
- 이승백
- 발행일
- 2011-07-06
- 학회명
- International Symposium on the Physics of Semiconductors and Applications 2011
- 개최지
- Ramada Plaza Jeju Hotel, Jeju