Detection and removal of airborne nanoparticles using kinetic and electrostatic force of paddle-type bridge MEMS sensors

제목
Detection and removal of airborne nanoparticles using kinetic and electrostatic force of paddle-type bridge MEMS sensors
저자
이승백
발행일
2011-07-06
학회명
International Symposium on the Physics of Semiconductors and Applications 2011
개최지
Ramada Plaza Jeju Hotel, Jeju