Effect of thermal annealing on the microstructural properties of Al-doped ZnO thin films grown on n-Si (100) substrates

  • 김태환
제목
Effect of thermal annealing on the microstructural properties of Al-doped ZnO thin films grown on n-Si (100) substrates
저자
김태환
발행일
2009-09-22
학회명
THE 2nd INTERNATIONAL CONFERENCE ON MICROELECTRONICS AND PLASMA TECHNOLOGY (ICMAP 2009)
개최지
BEXCO Convention Center, Busan, Korea