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Potassium Permanganate as Oxidizer in Alkaline Slurry for Chemical Mechanical Polishing of Nitrogen-doped Polycrystalline Ge2Sb2Te5 Film

  • 박재근
제목
Potassium Permanganate as Oxidizer in Alkaline Slurry for Chemical Mechanical Polishing of Nitrogen-doped Polycrystalline Ge2Sb2Te5 Film
저자
박재근
발행일
2010-06-10
학회명
2010 45th Technical Meeting of Korea CMPUGM
개최지
성균관대학교(Korea)

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