Characteristics of ZrO2/Al2O3 films for gate dielectric applications deposited by atomic deposition method

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Characteristics of ZrO2/Al2O3 films for gate dielectric applications deposited by atomic deposition method
저자
전형탁
발행일
2003-11-07
학회명
3rd International Symposium on Designing, Processing and Properties of Advanced Engineering Material
개최지
Jeju Island, Korea