상세 보기
- 제목
- Fenton Reaction for Enhancing Polishing Rate and Protonated Amine Functional Group Polymer for Inhibiting Corrosion in Ge1Sb4Te5 Film Surface Chemical-Mechanical-Planarization
- 저자
- 박재근
- 발행일
- 2022-11-14
- 학회명
- Korean international semiconductor conference on manufactureing technology 2022
- 개최지
- 부산