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Effect of Organic Additives in Ceria Slurry on Enhanced Oxide-to-Nitride Removal Selectivity in STI CMP

  • 박재근
제목
Effect of Organic Additives in Ceria Slurry on Enhanced Oxide-to-Nitride Removal Selectivity in STI CMP
저자
박재근
발행일
2006-11-03
학회명
2006년도 한국재료학회(추계학술대회)
개최지
수원대학교

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