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Effect of Polymer Type Additives in Selective Wet Etching of Si1-XGex- to Si-Film to Enhance Etch Rate Selectivity
- 제목
- Effect of Polymer Type Additives in Selective Wet Etching of Si1-XGex- to Si-Film to Enhance Etch Rate Selectivity
- 저자
- 박진섭
- 발행일
- 2024-10-08
- 학회명
- ECS PRiME2024
- 개최지
- 하와이