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Nanotopography Impact and Non-Prestonian Behavior of Ceria Slurry in STI-CMP

  • 박재근
제목
Nanotopography Impact and Non-Prestonian Behavior of Ceria Slurry in STI-CMP
저자
박재근
발행일
2004-02-20
학회명
Korean Confernce on Semiconductors 11th
개최지
Mujoo Resort, Seoul, Korea

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