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Exploring Electromagnetic Effects in High Frequency Helium Capacitively Coupled Plasma Discharges Using 1-D EM PIC-MCC Simulations
- 제목
- Exploring Electromagnetic Effects in High Frequency Helium Capacitively Coupled Plasma Discharges Using 1-D EM PIC-MCC Simulations
- 저자
- Ming-Chieh Lin
- 발행일
- 2024-10-07
- 학회명
- The 66th Annual Meeting of the APS Division of Plasma Physics
- 개최지
- Atlanta, Georgia