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Effects of Abrasive Size and Concentration with An-ionic Surfactant on the Non-Prestonian Behavior of Ceria Slurry in STI-CMP

  • 박재근
제목
Effects of Abrasive Size and Concentration with An-ionic Surfactant on the Non-Prestonian Behavior of Ceria Slurry in STI-CMP
저자
박재근
발행일
2006-11-03
학회명
ECS-2006 Joint International Meeting
개최지
Mexico

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