상세 보기
Growth Kinetics Control in Atmospheric Pressure Spatial Atomic Layer Deposition for Optimized Al₂O₃ Barrier Films in OLED Encapsulation
- 제목
- Growth Kinetics Control in Atmospheric Pressure Spatial Atomic Layer Deposition for Optimized Al₂O₃ Barrier Films in OLED Encapsulation
- 저자
- 박진성
- 발행일
- 2025-12-04
- 학회명
- IDW25
- 개최지
- 일본 히로시마