상세 보기
Investigating film property and growth behavior for rapid SiO2 atomic layer deposition
- 제목
- Investigating film property and growth behavior for rapid SiO2 atomic layer deposition
- 저자
- 박진성
- 발행일
- 2011-07-28
- 학회명
- 2011 International Forum on Functional Materials(IFFM 2011) The 2nd Special Symposium on Advances in Functional Materials(AFM-2)