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Characteristics of Low Temperature Al2O3 Encapsulation for Organic devices by Remote Plasma Atomic Layer Deposition

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Characteristics of Low Temperature Al2O3 Encapsulation for Organic devices by Remote Plasma Atomic Layer Deposition
저자
전형탁
발행일
2014-05-15
학회명
2014년도 한국재료학회 춘계학술발표대회
개최지
창원컨벤션센터

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