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Comparative Study of CMP Performance between Ge2Sb2Te5 and Ge1Sb7Te2 film for High Speed Phase Change Memory

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Comparative Study of CMP Performance between Ge2Sb2Te5 and Ge1Sb7Te2 film for High Speed Phase Change Memory
저자
박재근
발행일
2012-06-28
학회명
한국전기전자재료학회 창립 제25주년 기념 하계학술대회
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