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Localized bond states and quantum size effect in SiNx/p-Si(200) thin films deposited by rf-reactive sputtering method

  • 김은규
제목
Localized bond states and quantum size effect in SiNx/p-Si(200) thin films deposited by rf-reactive sputtering method
저자
김은규
발행일
2002-08-20
학회명
11th Seoul Inter. Symp. on Phys. of Semicond. & Appl.(ISPSA)-2002
개최지
Cheju, Korea

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