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Digital Deposition of Tungsten Nitride Thin Layer by Cyclic Exposure of WF6 and NH3

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제목
Digital Deposition of Tungsten Nitride Thin Layer by Cyclic Exposure of WF6 and NH3
저자
전형탁
발행일
2000-07-25
학회명
ICEE2K
개최지
Kitakyushu Japan

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