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Study for growth mechanism of homogeneously mixed silicon-tin oxide by atomic layer deposition with high gas diffusion barrier property
- 제목
- Study for growth mechanism of homogeneously mixed silicon-tin oxide by atomic layer deposition with high gas diffusion barrier property
- 저자
- 박진성
- 발행일
- 2022-11-09
- 학회명
- 2022 한국재료학회 추계학술대회