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Effect of Organic Modification of Nano Sized Silica Particles on the Surface Roughness of Copper Film in Cu CMP process

  • 박재근
제목
Effect of Organic Modification of Nano Sized Silica Particles on the Surface Roughness of Copper Film in Cu CMP process
저자
박재근
발행일
2005-03-30
학회명
2005 MRS SPRING MEETING
개최지
San Francisco, CA

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