ScholarWorks@한양대학교

상세 보기

Enhancement of Stress Distribution through Patterned Island Design Using Atmospheric Pressure Spatial-ALD

제목
Enhancement of Stress Distribution through Patterned Island Design Using Atmospheric Pressure Spatial-ALD
저자
박진성
발행일
2025-06-24
학회명
ALD/ALE 2025
개최지
ICC JEJU

ScholarWorks@한양대학교

(04763) 서울특별시 성동구 왕십리로 222 Tel. +82-2-2220-1370 +82-2-2220-1366

COPYRIGHT © 한양대학교 All Rights Reserved.

Certain data included herein are derived from the © Web of Science of Clarivate Analytics. All rights reserved.

You may not copy or re-distribute this material in whole or in part without the prior written consent of Clarivate Analytics.