Plasma enhanced Atomic Layer Deposited Indium Oxide Film Using a New Novel Liquid DMION Indium Precursor For Thin Film Transistors

제목
Plasma enhanced Atomic Layer Deposited Indium Oxide Film Using a New Novel Liquid DMION Indium Precursor For Thin Film Transistors
저자
박진성
발행일
2022-01-24
학회명
제29회 한국반도체학술대회