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Unveiling Thermally-Activated Defects for Highly Reliable ALD-IGZO FETs with High-Temperature Compatibility

제목
Unveiling Thermally-Activated Defects for Highly Reliable ALD-IGZO FETs with High-Temperature Compatibility
저자
박진성
발행일
2024-06-05
학회명
ISPSA 2024
개최지
Ramada Plaza Jeju Hotel, Jeju, Korea

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