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Enhancing Si1-XGex/Si Etch Rate Selectivity Using Etching Inhibitor in Radical Oxidation By Halide-Based Oxidant

  • 박재근
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Enhancing Si1-XGex/Si Etch Rate Selectivity Using Etching Inhibitor in Radical Oxidation By Halide-Based Oxidant
저자
박재근
발행일
2024-05-26
학회명
245th ECS Meeting
개최지
미국 샌프란시스코

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