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The role of molecular weight of poly(acrylic acid) on the oxide-to-nitride selectivity in STI CMP
- 제목
- The role of molecular weight of poly(acrylic acid) on the oxide-to-nitride selectivity in STI CMP
- 저자
- 백운규
- 발행일
- 2004-11-01
- 학회명
- The 3rd International Symposium on the Science of engineering ceramics
- 개최지
- senri-hankyu hotel