Material Properties for GaN wafer Fabricated with Hydrogen-Ion Implantation and HVPE growth

  • 박재근
제목
Material Properties for GaN wafer Fabricated with Hydrogen-Ion Implantation and HVPE growth
저자
박재근
발행일
2018-11-09
학회명
9th International Symposium for Advanced Functional Materials & Devices
개최지
SUMCO TECHXIV