Improved switching characteristics of p-type tin monoxide field-effect transistors through Schottky energy barrier engineering

  • Kim, Taikyu
  • Kim, Jeong-Kyu
  • Yoo, Baekeun
  • Xu, Hongwei
  • Yim, Sungyeon
  • ... Jeong, Jae Kyeong
  • 외 2명
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26
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29

초록

A low on-off current modulation ratio (I-ON/OFF) in p-type tin monoxide (SnO) field-effect transistors (FETs) is a critical bottleneck hampering their widespread application to transparent complementary metal oxide semiconductors (CMOSs) or monolithic integrated devices. To solve this problem, this study focuses on the source/drain (S/D) contact region. Also, a new perspective on the origin of the high off-current in SnO FETs, an electron injection from the drain electrode into the channel by Fermi-level pinning (FLP) at the off-state, is suggested. In this work, a metal-interlayer-semiconductor (MIS) S/D contact structure is adopted to suppress this adverse electron injection. An ultrathin interlayer (IL) of MIS contact alleviates metal-induced gap state (MIGS) penetration which is a primary cause of the severe FLP. A considerable enhancement is achieved by using the MIS contact structure: the off-current value decreased by approximately 20-fold from 5.1 x 10(-8) A to 2.4 x 10(-9) A; the I-ON/OFF value increased 10-fold from 2.7 x 10(2) to 2.8 x 10(3), which is interpreted by increased MIS contact-mediated electron SBH. This work presents a new approach that can be easily used alongside previously reported methods to suppress the off-current, providing enhanced switching capability of p-type SnO FETs using a simple method.

키워드

THIN-FILMSCONTACT RESISTIVITYINTERFACIAL LAYERPERFORMANCEREDUCTIONGEFABRICATION
제목
Improved switching characteristics of p-type tin monoxide field-effect transistors through Schottky energy barrier engineering
저자
Kim, TaikyuKim, Jeong-KyuYoo, BaekeunXu, HongweiYim, SungyeonKim, Seung-HwanYu, Hyun-YongJeong, Jae Kyeong
DOI
10.1039/c9tc04345d
발행일
2020-01
유형
Article
저널명
Journal of Materials Chemistry C
8
1
페이지
201 ~ 208