Crystalline Phase-Dependent Emissivity of MoSi2 Nanomembranes for Extreme Ultraviolet Pellicle Applications

초록

Extreme ultraviolet (EUV) pellicles must withstand intense thermal stress during exposure due to their limited heat dissipation, which results from their ultrathin geometry and the vacuum environment within EUV scanners. To address this challenge, we investigated the crystalline phase-dependent emissivity of nanometer-thick molybdenum disilicide (MoSi2) membranes. Membranes exhibiting amorphous, hexagonal, and tetragonal phases were independently prepared via controlled annealing, and their thermal radiation properties were evaluated using heat-load testing under emulated EUV scanner conditions. The Hall effect measurements revealed distinct variations in carrier density and mobility across phases, which were theoretically correlated with emissivity using the Lorentz–Drude model. The results demonstrate that emissivity increases in the hexagonal phase due to increased carrier density and reduced scattering, offering improved thermal radiation performance. These findings establish the phase engineering of conductive silicides as a viable strategy for enhancing radiative cooling in EUV pellicles and offer a theoretical framework applicable to other high-temperature nanomaterials.

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